Invention Grant
- Patent Title: Substrate polishing device and method thereof
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Application No.: US15171363Application Date: 2016-06-02
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Publication No.: US10166652B2Publication Date: 2019-01-01
- Inventor: Gi-Hwan Bae , Jun-Woo Hong
- Applicant: KnJ Co., LTD. , Samsung Display Co., Ltd.
- Applicant Address: KR Asan-si KR Gyeonggi-Do
- Assignee: KNJ CO., LTD.,SAMSUNG DISPLAY CO., LTD.
- Current Assignee: KNJ CO., LTD.,SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Asan-si KR Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Priority: KR10-2015-0079436 20150604
- Main IPC: B24B37/20
- IPC: B24B37/20

Abstract:
Provided are a device and method for polishing a substrate, in which an upper ground surface, a side surface and a lower ground surface of a substrate can be simultaneously polished, and a polishing wheel can be evenly used on the whole so as to be uniformly abraded. A substrate polishing system is to polish a substrate, of which upper edge and a lower edge are polished, and includes: a table, on which the substrate is secured; a spindle provided at the upper portion of a side surface of the table; a polishing wheel formed in the shape of a cylinder and having a rotating shaft mounted perpendicularly to the substrate, so as to polish the substrate with a side surface thereof while rotating by the spindle; and a Z axis movement means for moving the polishing wheel in the vertical direction during the polishing of the substrate.
Public/Granted literature
- US20160354895A1 SUBSTRATE POLISHING DEVICE AND METHOD THEREOF Public/Granted day:2016-12-08
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