Invention Grant
- Patent Title: Physical quantity sensor having an elongated groove, and manufacturing method thereof
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Application No.: US14326866Application Date: 2014-07-09
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Publication No.: US10167187B2Publication Date: 2019-01-01
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-143286 20130709; JP2014-088894 20140423; JP2014-088898 20140423
- Main IPC: B81B3/00
- IPC: B81B3/00
Abstract:
A physical quantity sensor includes a first sensor element, and an outer edge portion arranged in at least part of the outer periphery of the first sensor element, and a first groove extending in a first direction provided in the outer edge portion in a plan view of the outer edge portion.
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