Invention Grant
- Patent Title: Perforated contact electrode on vertical nanowire array
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Application No.: US15049404Application Date: 2016-02-22
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Publication No.: US10167192B2Publication Date: 2019-01-01
- Inventor: Hyun Jin In , Christopher Field , Pehr E. Pehrsson
- Applicant: The United States of America, as represented by the Secretary of the Navy
- Applicant Address: US DC Washington
- Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agency: US Naval Research Laboratory
- Agent Joseph T. Grunkemeyer
- Main IPC: G01N27/12
- IPC: G01N27/12 ; B82Y10/00 ; B82Y15/00 ; B82Y30/00 ; B82Y40/00 ; H01L29/06 ; G01N27/414 ; H01L29/45 ; G01R1/067

Abstract:
Disclosed herein is a structure having: a support, a plurality of nanowires perpendicular to the support, and an electrode in contact with a first end of each nanowire. Each nanowire has a second end in contact with the support. The electrode contains a plurality of perforations. The electrode contains a plurality of perforations. Also disclosed herein is a method of: providing the above support and nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; wherein the electrode contains a plurality of perforations.
Public/Granted literature
- US20160238554A1 PERFORATED CONTACT ELECTRODE ON VERTICAL NANOWIRE ARRAY Public/Granted day:2016-08-18
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