Invention Grant
- Patent Title: Using chemical vapor deposited films to control domain orientation in block copolymer thin films
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Application No.: US14698253Application Date: 2015-04-28
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Publication No.: US10167410B2Publication Date: 2019-01-01
- Inventor: C. Grant Wilson , William J. Durand , Christopher John Ellison , Christopher M. Bates , Takehiro Seshimo , Julia Cushen , Logan J. Santos , Leon Dean , Erica L. Rausch
- Applicant: Board of Regents, The University of Texas System
- Applicant Address: US TX Austin
- Assignee: Board of Regents, The University of Texas System
- Current Assignee: Board of Regents, The University of Texas System
- Current Assignee Address: US TX Austin
- Agency: Medlen & Carroll, LLP
- Main IPC: C09D153/00
- IPC: C09D153/00 ; C03C17/34 ; C03C17/30
Abstract:
Vacuum deposited thin films of material are used to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nano structured features in a block copolymer film that can serve as lithographic patterns.
Public/Granted literature
- US20150232689A1 Using Chemical Vapor Deposited Films to Control Domain Orientation in Block Copolymer Thin Films Public/Granted day:2015-08-20
Information query
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