Invention Grant
- Patent Title: Etching solution capable of suppressing particle appearance
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Application No.: US15584208Application Date: 2017-05-02
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Publication No.: US10167425B2Publication Date: 2019-01-01
- Inventor: Hoseong Yoo , Seunghyun Han , Wook Chang , Yongil Kim
- Applicant: OCI COMPANY LTD.
- Applicant Address: KR Seoul
- Assignee: OCI COMPANY LTD.
- Current Assignee: OCI COMPANY LTD.
- Current Assignee Address: KR Seoul
- Agency: Hauptman Ham, LLP
- Priority: KR10-2016-0055284 20160504; KR10-2016-0061281 20160519
- Main IPC: C09K13/08
- IPC: C09K13/08 ; C07C69/34 ; C07C69/02 ; H01L21/02 ; C08K5/54 ; C01B7/19

Abstract:
The present disclosure relates to an etching solution capable of suppressing particle appearance including a first silane compound in which three or more hydrophilic functional groups are independently bonded to a silicon atom and a second silane compound in which one or two hydrophilic functional groups are independently bonded to a silicon atom.
Public/Granted literature
- US20170321121A1 ETCHING SOLUTION CAPABLE OF SUPPRESSING PARTICLE APPEARANCE Public/Granted day:2017-11-09
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