Invention Grant
- Patent Title: Vacuum pressure control apparatus
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Application No.: US15414091Application Date: 2017-01-24
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Publication No.: US10167958B2Publication Date: 2019-01-01
- Inventor: Yasunori Nishimura , Masayuki Watanabe , Seiji Hashiguchi
- Applicant: CKD CORPORATION
- Applicant Address: JP Komaki
- Assignee: CKD CORPORATION
- Current Assignee: CKD CORPORATION
- Current Assignee Address: JP Komaki
- Agency: Oliff PLC
- Priority: JP2016-024229 20160211; JP2016-241462 20161213
- Main IPC: F16K1/226
- IPC: F16K1/226

Abstract:
A vacuum pressure control apparatus includes an annular elastic seal member formed with a valve seat, and a doubly eccentric butterfly valve element configured to come into contact or separate from the valve seat. The vacuum pressure control apparatus is to be placed on a pipe connecting a vacuum chamber and a vacuum pump. The vacuum pressure control apparatus is configured to rotate the butterfly valve element in a first direction from a first valve closed position corresponding to an initial state to change vacuum pressure in the vacuum chamber. The vacuum pressure control apparatus further includes a control unit configured to rotate the butterfly valve element in a direction opposite to a first direction so that the butterfly valve element is moved to a second valve closed position different from the first valve closed position.
Public/Granted literature
- US20170234437A1 VACUUM PRESSURE CONTROL APPARATUS Public/Granted day:2017-08-17
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