Invention Grant
- Patent Title: Strain monitoring of MRAM arrays
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Application No.: US15453431Application Date: 2017-03-08
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Publication No.: US10168143B2Publication Date: 2019-01-01
- Inventor: Anthony J. Annunziata , Chandrasekharan Kothandaraman , Thomas M. Shaw
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/16 ; H01L27/22 ; H01L43/08 ; H01L23/528 ; G11C29/00 ; G11C11/16

Abstract:
A method is presented for determining strain in a magnetoresistive random access memory (MRAM) structure. The method includes exposing long lines of the MRAM structure to monochromatic light to produce a diffraction pattern, measuring changes in interference fringe spacing in the diffraction pattern, determining the changes in the local strain in the MRAM structure from the measured changes in the interference fringe spacing, and assessing a performance of the MRAM structure from values of the changes in the local strain.
Public/Granted literature
- US20180259322A1 STRAIN MONITORING OF MRAM ARRAYS Public/Granted day:2018-09-13
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