Invention Grant
- Patent Title: Integrated microelectromechanical gyroscope with improved driving structure
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Application No.: US14578255Application Date: 2014-12-19
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Publication No.: US10168154B2Publication Date: 2019-01-01
- Inventor: Gabriele Cazzaniga , Luca Coronato
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITTO2009A1042 20091224
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5747 ; G01C19/02

Abstract:
An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.
Public/Granted literature
- US20170023363A1 INTEGRATED MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED DRIVING STRUCTURE Public/Granted day:2017-01-26
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