Invention Grant
- Patent Title: Reproducible and manufacturable nanogaps for embedded transverse electrode pairs in nanochannels
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Application No.: US15211413Application Date: 2016-07-15
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Publication No.: US10168299B2Publication Date: 2019-01-01
- Inventor: Adam M. Pyzyna , Joshua T. Smith , Benjamin H. Wunsch
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: G01N27/447
- IPC: G01N27/447 ; H01L21/311 ; H01L21/321 ; H01L21/3105 ; H01L21/02 ; H01L21/3205 ; B01L3/00

Abstract:
A method for forming a nanogap includes forming a knockoff feature on a dielectric layer and forming a trench in the dielectric layer on opposite sides of the knockoff feature. A noble metal is deposited in the trenches and over the knockoff feature. A top surface is polished to level the noble metal in the trenches with a top of the dielectric layer to form electrodes in the trenches and to remove the noble metal from the knockoff feature. A nanochannel is etched into the dielectric layer such that the knockoff feature is positioned within the nanochannel. The knockoff feature is removed to form a nanogap between the electrodes.
Public/Granted literature
- US20180017524A1 REPRODUCIBLE AND MANUFACTURABLE NANOGAPS FOR EMBEDDED TRANSVERSE ELECTRODE PAIRS IN NANOCHANNELS Public/Granted day:2018-01-18
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