Invention Grant
- Patent Title: Manufacturing method of diffraction grating
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Application No.: US15590427Application Date: 2017-05-09
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Publication No.: US10168457B2Publication Date: 2019-01-01
- Inventor: Takashi Sukegawa , Shigeru Sugiyama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-282546 20101220; JP2011-151277 20110707
- Main IPC: G02B5/18
- IPC: G02B5/18 ; C01B19/00 ; H01L31/0392

Abstract:
A manufacturing method of a Blazed diffraction grating configured to diffract incident light and made of a CdTe or CdZnTe crystal material includes the step of forming a plurality of grating grooves in a processed surface of a work through machining using a processing machine for the Blazed diffraction grating. The forming step forms the grating grooves so that among surfaces of gratings formed by the forming step, a surface that receives the incident light most is set to a (110) plane as a crystal orientation of the crystal material.
Public/Granted literature
- US20170242166A1 MANUFACTURING METHOD OF DIFFRACTION GRATING Public/Granted day:2017-08-24
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