Invention Grant
- Patent Title: Pattern irradiation apparatus having spatial light modulator and light blocking member for blocking 0-order light generated by spatial light modulator
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Application No.: US15295648Application Date: 2016-10-17
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Publication No.: US10168522B2Publication Date: 2019-01-01
- Inventor: Shintaro Fujii
- Applicant: OLYMPUS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: OLYMPUS CORPORATION
- Current Assignee: OLYMPUS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2013-078120 20130404
- Main IPC: G02B26/06
- IPC: G02B26/06 ; G02B21/08 ; G02B21/14 ; G02B27/46 ; G02B21/02

Abstract:
A pattern irradiation apparatus includes a light source unit, an objective that irradiates a sample plane with light emitted from the light source unit, a spatial light modulator of a phase modulation type that is arranged at a position conjugate with a pupil position of the objective and that modulates a phase of the light emitted from the light source unit, a light blocking member that is arranged in an optical path between the spatial light modulator and the objective and that is configured to block 0-order light generated by the spatial light modulator, and a control device that makes a correspondence between a focusing position of the 0-order light generated by the spatial light modulator and a position of the light blocking member.
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Information query