Invention Grant
- Patent Title: MQW devices and methods for semiconductor patterning systems
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Application No.: US15628611Application Date: 2017-06-20
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Publication No.: US10168622B2Publication Date: 2019-01-01
- Inventor: Yibing M. Wang , Duhyun Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02F1/017 ; G02F1/01

Abstract:
MQW devices, IC chips and methods may be used in semiconductor lithography patterning systems. An MQW device includes an array of pixels that have transmission elements and associated support circuits. The support circuits have preliminary memory cells and final memory cells. The final memory cells store transmittance values that control transmittances of the associated transmission elements. This way, exposure of a target with a lithography system for purposes of patterning the target may be performed through the transmission elements according to the controlled transmittances, while subsequent transmittance values are being received by the preliminary memory cells from memory banks. The exposure of the target therefore needs to pause for less time, in order to wait for the MQW device to be refreshed with the subsequent transmittance values. Accordingly the whole semiconductor lithography patterning system may operate faster and thus have more throughput.
Public/Granted literature
- US20170285486A1 MQW DEVICES & METHODS FOR SEMICONDUCTOR PATTERNING SYSTEMS Public/Granted day:2017-10-05
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