Invention Grant
- Patent Title: Method for handling thin brittle films
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Application No.: US15614092Application Date: 2017-06-05
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Publication No.: US10170311B2Publication Date: 2019-01-01
- Inventor: Stephen W. Bedell , Tim Kubera , Chérubin Noumissing Sao
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , AZUR SPACE SOLAR POWER GmbH
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L21/18
- IPC: H01L21/18 ; H01L21/683 ; B32B38/10

Abstract:
A method including: providing a structure comprising: a spalled layer having a first side and a second side; and a tape layer provided on the first side of the spalled layer, wherein the tape layer is provided at below a first temperature range; applying a temporary substrate layer to the second side of the spalled layer, wherein the temporary substrate layer is applied at a second temperature range, and wherein at least a portion of the second temperature range is lower than the first temperature range; and after applying the temporary substrate layer, separating the tape layer from the spalled layer.
Public/Granted literature
- US20170271159A1 METHOD FOR HANDLING THIN BRITTLE FILMS Public/Granted day:2017-09-21
Information query
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