Invention Grant
- Patent Title: Correlation between conductivity and pH measurements for KOH texturing solutions and additives
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Application No.: US14703459Application Date: 2015-05-04
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Publication No.: US10170350B2Publication Date: 2019-01-01
- Inventor: Ismail Kashkoush , Jennifer Rieker , Gim-Syang Chen , Dennis Nemeth
- Applicant: Akrion Systems, LLC
- Assignee: NAURA AKRION INC.
- Current Assignee: NAURA AKRION INC.
- Agency: The Belles Group, P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/66 ; H01L21/306 ; H01L31/0236
Abstract:
The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.
Public/Granted literature
- US20150318224A1 CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES Public/Granted day:2015-11-05
Information query
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