Invention Grant
- Patent Title: Devices and methods for dynamically tunable biasing to backplates and wells
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Application No.: US15634091Application Date: 2017-06-27
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Publication No.: US10170353B2Publication Date: 2019-01-01
- Inventor: Hui Zang , Min-hwa Chi
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Main IPC: H01L21/74
- IPC: H01L21/74 ; H01L23/48 ; H01L29/06 ; H01L29/10 ; H01L21/762 ; H01L21/768

Abstract:
Devices and methods of fabricating integrated circuit devices for dynamically applying bias to back plates and/or p-well regions are provided. One method includes, for instance: obtaining a wafer with a silicon substrate, at least one first oxide layer, at least one silicon layer, and at least one second oxide layer; forming at least one recess in the wafer; depositing at least one third oxide layer over the wafer and filling the at least one recess; depositing a silicon nitride layer over the wafer; and forming at least one opening having sidewalls and a bottom surface within the filled at least one recess. An intermediate semiconductor device is also disclosed.
Public/Granted literature
- US20170294336A1 DEVICES AND METHODS FOR DYNAMICALLY TUNABLE BIASING TO BACKPLATES AND WELLS Public/Granted day:2017-10-12
Information query
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