Invention Grant
- Patent Title: Semiconductor device and fabrication method thereof
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Application No.: US15806295Application Date: 2017-11-07
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Publication No.: US10170369B1Publication Date: 2019-01-01
- Inventor: Hsiao-Lin Hsu , En-Chiuan Liou
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: TW106134510A 20171006
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/78 ; H01L27/088 ; H01L29/40 ; H01L29/66

Abstract:
A semiconductor device includes a substrate having a fin structure extending along a first direction. The fin structure protrudes from a top surface of a trench isolation region and has a first height. A plurality of gate lines including a first gate line and a second gate line extend along a second direction and striding across the fin structure. The first gate line has a discontinuity directly above a gate cut region. The second gate line is disposed in proximity to a dummy fin region, and does not overlap with the dummy fin region. The fin structure has a second height within the dummy fin region, and the second height is smaller than the first height.
Information query
IPC分类: