- Patent Title: Methods for an ESD protection circuit including a floating ESD node
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Application No.: US15620207Application Date: 2017-06-12
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Publication No.: US10170459B1Publication Date: 2019-01-01
- Inventor: Tsung-Che Tsai , Manjunatha Govinda Prabhu , Vaddagere Nagaraju Vasantha Kumar
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner, P. C.
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L21/8249 ; H01L27/06 ; H01L21/8234

Abstract:
Methods to forming low trigger-voltage ESD protection circuit in FinFET IC devices and resulting devices. Embodiments include providing a substrate including a first-type well area in an ESD region; forming a base junction of the first-type along the perimeter of the ESD region; forming a shallow trench isolation (STI) region adjacent the base junction; forming alternate emitter and collector junctions of a second-type adjacent the STI region, parallel to and spaced from each other by parallel additional STI regions; forming at least one gate perpendicular to and over a collector junction; and forming a floating ESD nodes of the first-type in the collector junction adjacent one side of the at least one gate.
Public/Granted literature
- US20180358350A1 METHODS FOR AN ESD PROTECTION CIRCUIT INCLUDING A FLOATING ESD NODE Public/Granted day:2018-12-13
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