Methods for an ESD protection circuit including a floating ESD node
Abstract:
Methods to forming low trigger-voltage ESD protection circuit in FinFET IC devices and resulting devices. Embodiments include providing a substrate including a first-type well area in an ESD region; forming a base junction of the first-type along the perimeter of the ESD region; forming a shallow trench isolation (STI) region adjacent the base junction; forming alternate emitter and collector junctions of a second-type adjacent the STI region, parallel to and spaced from each other by parallel additional STI regions; forming at least one gate perpendicular to and over a collector junction; and forming a floating ESD nodes of the first-type in the collector junction adjacent one side of the at least one gate.
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