Invention Grant
- Patent Title: Switching device
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Application No.: US15684057Application Date: 2017-08-23
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Publication No.: US10170470B2Publication Date: 2019-01-01
- Inventor: Toru Onishi , Katsuhiro Kutsuki , Yasushi Urakami , Yukihiko Watanabe
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA , DENSO CORPORATION
- Applicant Address: JP Toyota JP Kariya
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA,DENSO CORPORATION
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA,DENSO CORPORATION
- Current Assignee Address: JP Toyota JP Kariya
- Agency: Oliff PLC
- Priority: JP2016-205797 20161020
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L27/088 ; H01L29/423 ; H01L29/16

Abstract:
A switching device may include a semiconductor substrate; gate trenches; bottom insulating layers covering bottom surfaces of the gate trenches; gate insulating layers covering side surfaces of the gate trenches; and gate electrodes arranged in the gate trenches. The gate insulating layers in a center portion may have a first thickness and a first dielectric constant, and one or more of the gate insulating layers in a peripheral portion may have, within at least a part of the peripheral portion, a second thickness thicker than the first thickness and a second dielectric constant greater than the first dielectric constant. The semiconductor substrate may include a first region being in contact with the gate insulating layers, a body region being in contact with the gate insulating layers under the first region, and a second region being in contact with the gate insulating layers under the body region.
Public/Granted literature
- US20180114789A1 SWITCHING DEVICE Public/Granted day:2018-04-26
Information query
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