Invention Grant
- Patent Title: Shaped terminals for a bipolar junction transistor
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Application No.: US15626241Application Date: 2017-06-19
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Publication No.: US10170553B2Publication Date: 2019-01-01
- Inventor: Renata Camillo-Castillo , Qizhi Liu , John J. Pekarik
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/732 ; H01L21/306 ; H01L29/08 ; H01L29/66 ; H01L29/737 ; H01L29/06 ; H01L29/10

Abstract:
Device structure and fabrication methods for a bipolar junction transistor. An emitter layer is formed on a base layer and etched to form an emitter of the device structure. The emitter layer has a concentration of an element that varies as a function of the thickness of the emitter layer. The etch rate of the emitter layer varies as a function of the concentration of the element such that the emitter has a variable width over the thickness of the emitter layer.
Public/Granted literature
- US20170288033A1 SHAPED TERMINALS FOR A BIPOLAR JUNCTION TRANSISTOR Public/Granted day:2017-10-05
Information query
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