Invention Grant
- Patent Title: Stable work function for narrow-pitch devices
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Application No.: US15813634Application Date: 2017-11-15
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Publication No.: US10170576B2Publication Date: 2019-01-01
- Inventor: Takashi Ando , Mohit Bajaj , Terence B. Hook , Rajan K. Pandey , Rajesh Sathiyanarayanan
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L29/49 ; H01L27/088 ; H01L21/28 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L29/786 ; H01L29/51 ; H01L29/78 ; H01L21/8234
Abstract:
A work function setting metal stack includes a configuration of layers including a high dielectric constant layer and a diffusion prevention layer formed on the high dielectric constant layer. An aluminum doped TiC layer has a thickness greater than 5 nm wherein the configuration of layers is employed between two regions as a diffusion barrier to prevent mass diffusion between the two regions.
Public/Granted literature
- US20180083116A1 STABLE WORK FUNCTION FOR NARROW-PITCH DEVICES Public/Granted day:2018-03-22
Information query
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