Invention Grant
- Patent Title: Methods of forming a vertical transistor device
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Application No.: US15268796Application Date: 2016-09-19
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Publication No.: US10170616B2Publication Date: 2019-01-01
- Inventor: Ruilong Xie , Steven J. Bentley , Jody A. Fronheiser
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/337
- IPC: H01L21/337 ; H01L29/78 ; H01L21/306 ; H01L29/66 ; H01L29/417 ; H01L29/423 ; H01L29/40

Abstract:
One illustrative method disclosed herein includes, among other things, defining a cavity in a plurality of layers of material positioned above a bottom source/drain (S/D) layer of semiconductor material, wherein a portion of the bottom source/drain (S/D) layer of semiconductor material is exposed at the bottom of the cavity, and performing at least one epi deposition process to form a vertically oriented channel semiconductor structure on the bottom source/drain (S/D) layer of semiconductor material and in the cavity and a top source/drain (S/D) layer of semiconductor material above the vertically oriented channel semiconductor structure. In this example, the method further includes removing at least one of the plurality of layers of material to thereby expose an outer perimeter surface of the vertically oriented channel semiconductor structure and forming a gate structure around the vertically oriented channel semiconductor structure.
Public/Granted literature
- US20180083136A1 METHODS OF FORMING A VERTICAL TRANSISTOR DEVICE Public/Granted day:2018-03-22
Information query
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