Invention Grant
- Patent Title: Vertical transport field effect transistors
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Application No.: US15424379Application Date: 2017-02-03
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Publication No.: US10170617B2Publication Date: 2019-01-01
- Inventor: Jiseok Kim , Hiroaki Niimi , Hoon Kim , Puneet Harischandra Suvarna , Steven Bentley , Jody A. Fronheiser
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES
- Current Assignee: GLOBALFOUNDRIES
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/10 ; H01L29/36 ; H01L29/66 ; H01L29/417

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to vertical transport field effect transistor devices and methods of manufacture. A structure includes: a vertical fin structure having a lower dopant region, an upper dopant region and a channel region between the lower dopant region and the upper dopant region; and a doped semiconductor material provided on sides of the vertical fin structure at a lower portion. The lower dopant region being composed of the doped semiconductor material which is merged into the vertical fin structure at the lower portion.
Public/Granted literature
- US20180226505A1 VERTICAL TRANSPORT FIELD EFFECT TRANSISTORS Public/Granted day:2018-08-09
Information query
IPC分类: