Invention Grant
- Patent Title: Method of fabricating semiconductor device
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Application No.: US15796874Application Date: 2017-10-30
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Publication No.: US10170623B2Publication Date: 2019-01-01
- Inventor: En-Chiuan Liou , Tang-Chun Weng , Chien-Hao Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201510424934 20150720
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L29/78 ; H01L29/66 ; H01L29/06

Abstract:
A semiconductor device and a method of fabricating the same, the semiconductor device includes a plurality of fin shaped structures, a trench, a spacing layer and a dummy gate structure. The fin shaped structures are disposed on a substrate. The trench is disposed between the fin shaped structures. The spacing layer is disposed on sidewalls of the trench, wherein the spacing layer has a top surface lower than a top surface of the fin shaped structures. The dummy gate structure is disposed on the fin shaped structures and across the trench.
Public/Granted literature
- US20180047848A1 METHOD OF FABRICATING SEMICONDUCTOR DEVICE Public/Granted day:2018-02-15
Information query
IPC分类: