Invention Grant
- Patent Title: Wire-last gate-all-around nanowire FET
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Application No.: US15180314Application Date: 2016-06-13
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Publication No.: US10170634B2Publication Date: 2019-01-01
- Inventor: Josephine B. Chang , Michael A. Guillorn , Isaac Lauer , Jeffrey W. Sleight
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/66 ; H01L29/786 ; H01L29/06 ; H01L21/324 ; H01L21/02 ; H01L21/306 ; H01L29/40 ; H01L29/775

Abstract:
A nanowire field effect transistor (FET) device includes a first source/drain region and a second source/drain region. Each of the first and second source/drain regions are formed on an upper surface of a bulk semiconductor substrate. A gate region is interposed between the first and second source/drain regions, and directly on the upper surface of the bulk semiconductor substrate. A plurality of nanowires are formed only in the gate region. The nanowires are suspended above the semiconductor substrate and define gate channels of the nanowire FET device. A gate structure includes a gate electrode formed in the gate region such that the gate electrode contacts an entire surface of each nanowire.
Public/Granted literature
- US20170194509A1 WIRE-LAST GATE-ALL-AROUND NANOWIRE FET Public/Granted day:2017-07-06
Information query
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