Invention Grant
- Patent Title: 3D memory
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Application No.: US14987147Application Date: 2016-01-04
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Publication No.: US10170639B2Publication Date: 2019-01-01
- Inventor: John Hopkins , Darwin Franseda Fan , Fatma Arzum Simsek-Ege , James Brighten , Aurelio Giancarlo Mauri , Srikant Jayanti
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/423 ; H01L29/66 ; H01L27/11556 ; H01L29/40 ; H01L21/28 ; H01L27/11582 ; H01L29/51 ; H01L27/11524 ; H01L29/78

Abstract:
Three-dimensional memory cells and methods of making and using the memory cells are discussed generally herein. In one or more embodiments, a three-dimensional vertical memory can include a memory stack. Such a memory stack can include memory cells and a dielectric between adjacent memory cells, each memory cell including a control gate and a charge storage structure. The memory cell can further include a barrier material between the charge storage structure and the control gate, the charge storage structure and the barrier material having a substantially equal dimension.
Public/Granted literature
- US20160133752A1 3D MEMORY Public/Granted day:2016-05-12
Information query
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