Fluid controller heating apparatus and fluid control apparatus
Abstract:
A fluid controller heating apparatus includes a cylindrical heater unit that surrounds a portion of an opening-and-closing valve to be heated, and a heat insulation jacket that surrounds the heater unit. The heater unit includes a pair of heat-transfer members to which plate-shaped heaters are fixed, respectively. The heat-transfer members are mounted so as to hold the opening-and-closing valve therebetween from both sides and are capable of being coupled to each other with a screw member. The heat insulation jacket is a cylindrical integrated product.
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