Invention Grant
- Patent Title: Differential pressure detection element, flow rate measurement device, and method of manufacturing differential pressure detection element
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Application No.: US15557018Application Date: 2017-02-01
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Publication No.: US10175073B2Publication Date: 2019-01-08
- Inventor: Hayato Arai , Tatsuya Shioiri , Naoki Takayama
- Applicant: FUJIKURA LTD.
- Applicant Address: JP Tokyo
- Assignee: FUJIKURA LTD.
- Current Assignee: FUJIKURA LTD.
- Current Assignee Address: JP Tokyo
- Agency: Osha Liang LLP
- Priority: JP2016-047102 20160310
- International Application: PCT/JP2017/003593 WO 20170201
- International Announcement: WO2017/154424 WO 20170914
- Main IPC: G01F1/38
- IPC: G01F1/38 ; B81B3/00 ; B81C1/00 ; G01L13/06 ; G01F1/34

Abstract:
A differential pressure detection element includes: a support portion having an opening; a cantilever portion supported in a cantilever manner by the support portion so as to protrude into the opening; a diffusion layer including a piezoresistive portion provided at a fixed end of the cantilever portion; a pair of wiring portions electrically connected to the diffusion layer; a first insulating layer covering the diffusion layer; and a second insulating layer laid on the first insulating layer. A linear expansion coefficient of the first insulating layer is smaller than a linear expansion coefficient of a material of which the cantilever portion is composed, and a linear expansion coefficient of the second insulating layer is larger than the linear expansion coefficient of the first insulating layer.
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