Invention Grant
- Patent Title: Temperature sensor with frequency-controlled reference
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Application No.: US15364179Application Date: 2016-11-29
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Publication No.: US10175119B1Publication Date: 2019-01-08
- Inventor: Michael H. Perrott , Shungneng Lee
- Applicant: SiTime Coporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Santa Clara
- Agent Charles Shemwell
- Main IPC: G01K7/34
- IPC: G01K7/34 ; G01K7/16 ; G01K7/22
Abstract:
The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.
Information query
