Invention Grant
- Patent Title: MEMS-based calorimeter, fabrication, and use thereof
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Application No.: US14957869Application Date: 2015-12-03
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Publication No.: US10175123B2Publication Date: 2019-01-08
- Inventor: Qiao Lin , Bin Wang , Yuan Jia
- Applicant: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- Applicant Address: US NY New York
- Assignee: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- Current Assignee: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- Current Assignee Address: US NY New York
- Agency: Baker Botts L.L.P.
- Main IPC: G01K17/00
- IPC: G01K17/00 ; G01N25/48
Abstract:
MEMS-based calorimeter including two microchambers supported in a thin film substrate formed on a polymeric layer is provided. The thin film substrate includes a thermoelectric sensor configured to measure temperature differential between the two microchambers, and also includes a thermally stable and high strength polymeric diaphragm. Methods for fabricating the MEMS-based calorimeter, as well as methods of using the calorimeter to measure thermal properties of materials, such as biomolecules, or thermodynamic properties of chemical reactions or physical interactions, are also provided.
Public/Granted literature
- US20160216163A1 MEMS-BASED CALORIMETER, FABRICATION, AND USE THEREOF Public/Granted day:2016-07-28
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