Invention Grant
- Patent Title: Method for determining a pressure measurement signal, and a pressure measurement arrangement for same
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Application No.: US15514860Application Date: 2014-10-17
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Publication No.: US10175129B2Publication Date: 2019-01-08
- Inventor: Jörn Jacob , Bernhard Weller
- Applicant: VEGA GRIESHABER KG
- Applicant Address: DE Wolfach
- Assignee: VEGA GRIESHABER KG
- Current Assignee: VEGA GRIESHABER KG
- Current Assignee Address: DE Wolfach
- Agent William Gray Mitchell
- International Application: PCT/EP2014/072288 WO 20141017
- International Announcement: WO2016/058647 WO 20160421
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L13/00 ; G01L13/02 ; G01L27/00

Abstract:
The invention relates to a method for determining a pressure measurement signal in a capacitive pressure measurement cell which comprises a main body and a measurement membrane that is arranged on the front of said main body. Electrodes are arranged on said main body and measurement membrane and form a measurement capacitance in a region of the measurement membrane which has a high degree of pressure sensitivity, and form a reference capacitance in a region of the measurement membrane which has a lower degree of pressure sensitivity, said measurement capacitance and reference capacitance being determined independently of one another, the pressure measurement signal being determined in a first measurement range from the measurement capacitance and the reference capacitance, in accordance with the first evaluation, and said pressure measurement signal being determined in a second measurement range from the reference capacitance in accordance with a second evaluation.
Public/Granted literature
- US20170234748A1 METHOD FOR DETERMINING A PRESSURE MEASUREMENT SIGNAL, AND A PRESSURE MEASUREMENT ARRANGEMENT FOR SAME Public/Granted day:2017-08-17
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