Invention Grant
- Patent Title: Pressure sensor, differential pressure sensor, and mass flow rate control device using same
-
Application No.: US15517261Application Date: 2015-10-06
-
Publication No.: US10175132B2Publication Date: 2019-01-08
- Inventor: Kengo Suzuki , Isao Sakaguchi , Takahiro Umeyama
- Applicant: Hitachi Metals, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi Metals, Ltd.
- Current Assignee: Hitachi Metals, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2014-206347 20141007
- International Application: PCT/JP2015/078358 WO 20151006
- International Announcement: WO2016/056555 WO 20160414
- Main IPC: G06F11/00
- IPC: G06F11/00 ; G01L19/02 ; G01L9/04 ; G01L13/02 ; A61B5/00 ; G01L1/20 ; G01L1/22 ; G01L9/12 ; G01L27/00 ; A61B5/021 ; A61B5/03

Abstract:
The present invention makes it possible to, even when a stainless steel is adopted in a diaphragm: prevent the diaphragm and a strain sensor from exfoliating from each other; be hardly susceptible to the influence of temperature in an operating environment; not allow the sensitivity of a pressure sensor to be dominated only by the mechanical characteristic of a material constituting the diaphragm; and increase the degree of freedom in design of members constituting the pressure sensor. A pressure sensor according to the present invention is, in order to solve the above problems, characterized in that: the pressure sensor has a diaphragm deforming by the pressure of a fluid, an elastic body covering the whole surface of the diaphragm and joining to the diaphragm on one side, and a strain sensor being arranged by joining on the other side of the elastic body and on an end side apart from a position corresponding to the center of the diaphragm and detecting the deformation of the elastic body working together with the deformation of the diaphragm as a strain; and the elastic body is formed of a material having a linear expansion coefficient close to the linear expansion coefficient of a material constituting the strain sensor.
Public/Granted literature
- US20170299456A1 Pressure Sensor, Differential Pressure Sensor, and Mass Flow Rate Control Device Using Same Public/Granted day:2017-10-19
Information query