Invention Grant
- Patent Title: Sensor with protective layer
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Application No.: US14890752Application Date: 2014-06-04
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Publication No.: US10175133B2Publication Date: 2019-01-08
- Inventor: Richard A. Cooke , George Gonnella , Sung In Moon , Charles W. Extrand , John E. Pillion
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- International Application: PCT/US2014/040904 WO 20140604
- International Announcement: WO2014/197590 WO 20141211
- Main IPC: G01L19/06
- IPC: G01L19/06 ; B81B7/00

Abstract:
A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C.
Public/Granted literature
- US20160103033A1 Sensor With Protective Layer Public/Granted day:2016-04-14
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