A data display processing device for a scanning probe microscope includes: a group information storage unit for managing and storing a plurality of measurement data sets; specified data acquisition means for acquiring, from the storage unit, a specified measurement data set; display controlling means for displaying the specified data set as an image; preliminary image generation means for, triggered by determination of the specified data set, acquiring other measurement data set or sets belonging to a group including the specified data set from the group information storage unit, and generating a preliminary image which is an image or images which will be used when displaying the other measurement data set or sets; and first display switching means for switching to display the preliminary image within a predetermined region in response to a first predetermined input operation by the user performed while the specified data set is displayed.