Invention Grant
- Patent Title: Optical nanoprobing of integrated circuits
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Application No.: US15192976Application Date: 2016-06-24
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Publication No.: US10175295B2Publication Date: 2019-01-08
- Inventor: Vladimir A. Ukraintsev , Mike Berkmyre
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI COMPANY
- Current Assignee: FEI COMPANY
- Current Assignee Address: US OR Hillsboro
- Agent Denton W. McAlister
- Main IPC: G01N21/65
- IPC: G01N21/65 ; G01R31/311

Abstract:
Apparatus for electrical and optical nanoprobing at resolution beyond optical diffraction limit. Navigation microscope is configured for navigation to a region of interest. A probe spatial positioner supports a fork and an oscillating piezotube is attached to the free end of the fork and provides an output indicating of a distance to the sample. A single-mode optical fiber having a near-field transducer formed at an end thereof is attached to the oscillating piezotube such that the near-field transducer extends below the oscillating piezotube towards the sample. A photodetector is positioned to detect photons collected from the sample. The near-field transducer may be formed as a tapered section formed at the end of the single-mode optical fiber, a metallic coating formed at a tip of the tapered section, and an aperture formed in the metallic coating so as to expose the tip of the tapered section through the metallic coating.
Public/Granted literature
- US20160377675A1 OPTICAL NANOPROBING OF INTEGRATED CIRCUITS Public/Granted day:2016-12-29
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