Invention Grant
- Patent Title: Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation
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Application No.: US15165547Application Date: 2016-05-26
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Publication No.: US10175474B2Publication Date: 2019-01-08
- Inventor: Domenico Giusti , Roberto Carminati , Massimiliano Merli
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102015000080884 20151207
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; B81B3/00 ; H04N9/31

Abstract:
A micromechanical device includes a tiltable structure that is rotatable about a first rotation axis. The tiltable structure is coupled to a fixed structure through an actuation structure of a piezoelectric type. The actuation structure is formed by spring elements having a spiral shape. The spring elements each include actuation arms extending transversely to the first rotation axis. Each actuation arm carries a respective piezoelectric band of piezoelectric material. The actuation arms are divided into two sets with the piezoelectric bands thereof biased in phase opposition to obtain rotation in opposite directions of the tiltable structure about the first rotation axis.
Public/Granted literature
- US20170160540A1 MICROMECHANICAL DEVICE HAVING A STRUCTURE TILTABLE BY A QUASI-STATIC PIEZOELECTRIC ACTUATION Public/Granted day:2017-06-08
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