Invention Grant
- Patent Title: Hybrid coloring methodology for multi-pattern technology
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Application No.: US15182510Application Date: 2016-06-14
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Publication No.: US10175571B2Publication Date: 2019-01-08
- Inventor: Xiangdong Chen , Hyeokjin Bruce Lim , Ohsang Kwon , Mickael Malabry , Jingwei Zhang , Raymond George Stephany , Haining Yang , Kern Rim , Stanley Seungchul Song , Mukul Gupta , Foua Vang
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Arent Fox LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/70 ; G03F7/20

Abstract:
In an aspect of the disclosure, a method, a computer-readable medium, and an apparatus for assigning feature colors for a multiple patterning process are provided. The apparatus receives integrated circuit layout information including a set of features and an assigned color of a plurality of colors for each feature of a first subset of features of the set of features. In addition, the apparatus performs color decomposition on a second subset of features to assign colors to features in the second subset of features. The second subset of features includes features in the set of features that are not included in the first subset of features with an assigned color.
Public/Granted literature
- US20160370699A1 HYBRID COLORING METHODOLOGY FOR MULTI-PATTERN TECHNOLOGY Public/Granted day:2016-12-22
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