Invention Grant
- Patent Title: Optical element, optical assembly and production method
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Application No.: US15604977Application Date: 2017-05-25
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Publication No.: US10175582B2Publication Date: 2019-01-08
- Inventor: Roland Pilz , Thomas Petasch
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102014224717 20141203
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B21/33 ; G02B27/00 ; G02B1/14 ; G02B1/18 ; G02B7/02

Abstract:
An optical element for transmitting radiation includes: a first surface region surrounding an optically used area of the optical element; and a second surface region that adjoins the first surface region. A circumferential edge is formed between the first and second surface regions. The optical element further includes a one-piece film which covers the first surface region, the edge and the second surface region. The film includes a hydrophobic material at least on its side facing away from the first and the second surface regions. An optical assembly includes at least one such optical element. A method produces such an optical element.
Public/Granted literature
- US20170261860A1 OPTICAL ELEMENT, OPTICAL ASSEMBLY AND PRODUCTION METHOD Public/Granted day:2017-09-14
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