Invention Grant
- Patent Title: Chip packaging method by using a temporary carrier for flattening a multi-layer structure
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Application No.: US15603475Application Date: 2017-05-24
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Publication No.: US10177011B2Publication Date: 2019-01-08
- Inventor: Hung-Hsin Hsu , Nan-Chun Lin , Shang-Yu Chang Chien
- Applicant: POWERTECH TECHNOLOGY INC.
- Applicant Address: TW Hsinchu County
- Assignee: POWERTECH TECHNOLOGY INC.
- Current Assignee: POWERTECH TECHNOLOGY INC.
- Current Assignee Address: TW Hsinchu County
- Agent Winston Hsu
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L21/683 ; H01L23/00 ; H01L21/56 ; H01L23/498

Abstract:
A chip packaging method includes forming a first redistribution layer and a first dielectric layer on a first temporary carrier to generate a plurality of first conductive interfaces close to the first temporary carrier, each pair of neighboring first conductive interfaces having a first pitch; forming a second dielectric layer on a first portion of the first redistribution layer and the first dielectric layer so as to cover the first portion of the first redistribution layer and expose a second portion; and forming a second redistribution layer and a third dielectric layer over the second dielectric layer to generate a plurality of second conductive interfaces. A circuitry being formed by at least the first redistribution layer and the second redistribution layer and each pair of neighboring second conductive interfaces has a second pitch larger than the first pitch.
Public/Granted literature
- US20180301352A1 CHIP PACKAGING METHOD BY USING A TEMPORARY CARRIER FOR FLATTENING A MULTI-LAYER STRUCTURE Public/Granted day:2018-10-18
Information query
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