Invention Grant
- Patent Title: Monocrystal and polycrystal texturing device
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Application No.: US15866736Application Date: 2018-01-10
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Publication No.: US10177013B2Publication Date: 2019-01-08
- Inventor: Guojun Zuo
- Applicant: CHANGZHOU S.C EXACT EQUIPMENT CO., LTD.
- Applicant Address: CN Changzhou, Jiangsu Province
- Assignee: CHANGZHOU S.C EXACT EQUIPMENT CO., LTD.
- Current Assignee: CHANGZHOU S.C EXACT EQUIPMENT CO., LTD.
- Current Assignee Address: CN Changzhou, Jiangsu Province
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: CN201510556630 20150906
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C30B33/10 ; H01L31/18 ; B08B3/02 ; C30B29/06 ; B08B3/04 ; H01L31/0236

Abstract:
A monocrystal and polycrystal texturing device includes a device body, various stations arranged in the device body, a transmission device and a control system. The various stations are respectively a dipping acid texturing station, a spray washing station, a drying station, a spray alkali texturing station, a spray washing station, a dipping acid treatment station, a spray washing station, an acid treatment station, a spray washing station and a drying station arranged in sequence. The transmission device is for transmitting a silicon wafer to each station in sequence. The spray alkali texturing station is also connected with a heating device. The control system controls the working status of each station and the heating device. The technology of the present invention has the advantages of stable operation, high efficiency and reliability, and can conduct seamless switching among polycrystal acid texturing, monocrystal alkali texturing, monocrystal acid texturing, and monocrystal alkali texturing.
Public/Granted literature
- US20180166299A1 MONOCRYSTAL AND POLYCRYSTAL TEXTURING DEVICE Public/Granted day:2018-06-14
Information query
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