SOI-based floating gate memory cell
Abstract:
One illustrative device disclosed a floating gate capacitor located in and above a first region of an SOI substrate located on a first side of an isolation trench and a transistor device located in and above a second region of the SOI substrate that is on the opposite side of the isolation trench. The device also includes a control gate formed in the bulk semiconductor layer in the first region and a gate structure that extends across the isolation trench and above the first and second regions. A first portion of the gate structure is positioned above the first region and the control gate and a second portion of the gate structure is positioned above the second region, wherein the first portion of the gate structure constitutes a floating gate for the floating gate capacitor and the second portion of the gate structure constitutes a transistor gate structure for the transistor device.
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