Invention Grant
- Patent Title: Image sensor device and method for forming the same
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Application No.: US15821975Application Date: 2017-11-24
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Publication No.: US10177191B1Publication Date: 2019-01-08
- Inventor: Yun-Wei Cheng , Chun-Hao Chou , Kuo-Cheng Lee , Hsun-Ying Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L31/02 ; H01L27/146 ; H01L29/08 ; H01L29/66

Abstract:
A method for forming an image sensor device is provided. The method includes providing a substrate. The substrate has a front surface and a back surface, and the substrate has a light-receiving region and a device region. The method includes forming a first transistor and a first source/drain structure respectively in the light-receiving region and the device region. The first transistor includes a first gate structure, a light-sensing structure, a second source/drain structure, the first gate structure is over the front surface, the light-sensing structure and the second source/drain structure are formed in the substrate and are respectively located at opposite first sides of the first gate structure, the first source/drain structure is formed in the substrate, and the first source/drain structure is electrically connected to the second source/drain structure. The method includes forming a light-blocking layer over the back surface.
Information query
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