Invention Grant
- Patent Title: Array of mesa photodiodes with an improved MTF
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Application No.: US14705078Application Date: 2015-05-06
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Publication No.: US10177193B2Publication Date: 2019-01-08
- Inventor: Laurent Mollard , Nicolas Baier
- Applicant: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1401208 20140527
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L27/144 ; H01L27/146 ; H01L31/103 ; H01L31/0296 ; H01L31/0352

Abstract:
An array of mesa photodiodes, including a useful layer of CdxHg1-xTe wherein pads are formed. The array includes a first doped zone having a first N or P doping; and second doped zones having a second P or N doping of a different type from that of the first doping, and each extending on an upper region of a pad. The first doped zone includes at least one first region having a first doping density, located at least under each of the pads; and at least one second region, located between two neighboring pads, and having a second doping density higher than the first doping density, each second region being separated from the closest second doped zone by at least one portion of the first region.
Public/Granted literature
- US20150349151A1 ARRAY OF MESA PHOTODIODES WITH AN IMPROVED MTF Public/Granted day:2015-12-03
Information query
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