Invention Grant
- Patent Title: Magnetic inductor stacks with multilayer isolation layers
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Application No.: US15724421Application Date: 2017-10-04
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Publication No.: US10177213B2Publication Date: 2019-01-08
- Inventor: Hariklia Deligianni , Bruce B. Doris , Eugene J. O'Sullivan , Naigang Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/522

Abstract:
A magnetic laminating structure and process includes alternating layers of a magnetic material and a multilayered insulating material, wherein the multilayered insulating material is intermediate adjacent magnetic material layers and comprises a first insulating layer abutting at least one additional insulating layer, wherein the first insulating layer and the at least one additional insulating layer comprise different dielectric materials and/or are formed by a different deposition process, and wherein the layers of the magnetic material have a cumulative thickness greater than 1 micron.
Public/Granted literature
- US20180047805A1 MAGNETIC INDUCTOR STACKS WITH MULTILAYER ISOLATION LAYERS Public/Granted day:2018-02-15
Information query
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