Invention Grant
- Patent Title: Semiconductor device and method for manufacturing semiconductor device
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Application No.: US15540410Application Date: 2015-08-05
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Publication No.: US10177228B2Publication Date: 2019-01-08
- Inventor: Hiroshi Watanabe
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Chiyoda-ku
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-004882 20150114
- International Application: PCT/JP2015/072196 WO 20150805
- International Announcement: WO2016/113938 WO 20160721
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/739 ; H01L29/861 ; H01L29/12 ; H01L29/36 ; H01L29/66 ; H01L29/06 ; H01L29/16 ; H01L21/02 ; H01L21/04 ; H01L29/732

Abstract:
The present techniques relate to a semiconductor device having resistance which has a positive temperature coefficient and a suitable value, and to a method for manufacturing a semiconductor device having resistance which has a positive temperature coefficient and a suitable value. The semiconductor device related to the present techniques is a bipolar device in which a current flows through a pn junction. The semiconductor device includes an n-type silicon carbide drift layer, a p-type first silicon carbide layer formed on the silicon carbide drift layer, and a p-type second silicon carbide layer formed on the first silicon carbide layer. Then, the second silicon carbide layer has a positive temperature coefficient of resistance.
Public/Granted literature
- US20170373152A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2017-12-28
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