Invention Grant
- Patent Title: Thin film transistor, method for fabricating the same, display substrate and display device
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Application No.: US15310424Application Date: 2016-02-14
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Publication No.: US10177257B2Publication Date: 2019-01-08
- Inventor: Shi Shu , Bin Zhang , Chuanxiang Xu , Yonglian Qi
- Applicant: BOE TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Womble Bond Dickinson (US) LLP
- Priority: CN201510609039 20150922
- International Application: PCT/CN2016/073760 WO 20160214
- International Announcement: WO2017/049845 WO 20170330
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L29/786 ; H01L27/12 ; H01L21/3065 ; H01L21/308 ; H01L21/311 ; H01L29/66

Abstract:
A thin film transistor, a method for fabricating the same, a display substrate, and a display device are disclosed. The method comprises: forming in sequence a light shielding layer, an insulating layer, and a semiconductor layer; and forming a pattern of the light shielding layer, the insulating layer, and the semiconductor layer in one patterning process. A polycrystalline silicon layer can be formed into an active layer and an amorphous silicon layer into the light shielding layer, by using only one mask. The number of masking processes is reduced by one, which simplifies a fabricating process of the thin film transistor.
Public/Granted literature
- US20180182897A1 THIN FILM TRANSISTOR, METHOD FOR FABRICATING THE SAME, DISPLAY SUBSTRATE AND DISPLAY DEVICE Public/Granted day:2018-06-28
Information query
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