Invention Grant
- Patent Title: Bulk acoustic wave resonator comprising multiple acoustic reflectors
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Application No.: US14725086Application Date: 2015-05-29
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Publication No.: US10177736B2Publication Date: 2019-01-08
- Inventor: Brice Ivira , Tiberiu Jamneala , Domingo Figueredo
- Applicant: Avago Technologies General IP (Singapore) Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Avago Technologies International Sales Pte. Limited
- Current Assignee: Avago Technologies International Sales Pte. Limited
- Current Assignee Address: SG Singapore
- Main IPC: H03H9/17
- IPC: H03H9/17

Abstract:
A bulk acoustic wave (BAW) resonator includes: a plurality of acoustic reflectors disposed in a substrate; a lower electrode disposed over the plurality of acoustic reflectors; a piezoelectric layer disposed over the lower electrode; and a plurality of upper electrodes, disposed over the piezoelectric layer. One of the plurality of upper electrodes is formed over a respective one of the plurality of acoustic reflectors. Each of the plurality of upper electrodes, the piezoelectric layer, the lower electrode, and each of the acoustic reflectors form an individual active area.
Public/Granted literature
- US20160352308A1 BULK ACOUSTIC WAVE RESONATOR COMPRISING MULTIPLE ACOUSTIC REFLECTORS Public/Granted day:2016-12-01
Information query
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