Invention Grant
- Patent Title: Elastic wave device
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Application No.: US15230529Application Date: 2016-08-08
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Publication No.: US10177739B2Publication Date: 2019-01-08
- Inventor: Michio Kadota
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2014-050381 20140313
- Main IPC: H03H9/64
- IPC: H03H9/64 ; H03H9/02 ; H03H9/145

Abstract:
An elastic wave device includes an IDT electrode disposed on a LiNbO3 substrate and an aluminum nitride film or a silicon nitride film is stacked to cover the IDT electrode and utilizes a leaky elastic wave. The IDT electrode includes a metal selected from a group consisting of Cu, Al, Au, Pt, and Ni. Euler angles of the LiNbO3 are (0°±5°, θ, 0°±5°), and when X denotes a wavelength-normalized thickness of the IDT electrode and Y denotes θ of the Euler angles, Y is set in a specific range depending on the range of the wavelength-normalized thickness of the IDT electrode, the range of the wavelength-normalized thickness of the aluminum nitride film or the silicon nitride film, and the kind of metal of which the IDT electrode is composed.
Public/Granted literature
- US20160344369A1 ELASTIC WAVE DEVICE Public/Granted day:2016-11-24
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