Invention Grant
- Patent Title: Method for forming color filter array, method for manufacturing imaging apparatus, and imaging apparatus
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Application No.: US14838145Application Date: 2015-08-27
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Publication No.: US10178286B2Publication Date: 2019-01-08
- Inventor: Masao Ishioka , Daisuke Shimoyama , Takayuki Sumida , Kei Aoki , Yasuhiro Kawabata , Naoki Inatani , Tomoyuki Tezuka , Jun Iwata , Masaki Kurihara
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2014-176288 20140829
- Main IPC: H01L21/14
- IPC: H01L21/14 ; H04N5/225 ; G02B5/20 ; G03F7/00 ; G03F7/20 ; G03F7/32 ; G03F7/40 ; H01L27/146
Abstract:
A method for forming a color filter array includes a step of exposing a photosensitive color filter film, a step of forming a color filter array from the color filter film by developing the color filter film using a developer, and a step of cleaning the color filter array while rotating the color filter array and moving a nozzle for spraying fluid containing liquid and gas above the color filter array in a direction intersecting with an axis of the rotation. The method reduces variation in thickness of a color filter that is generated in the cleaning step.
Public/Granted literature
- US20160065916A1 METHOD FOR FORMING COLOR FILTER ARRAY, METHOD FOR MANUFACTURING IMAGING APPARATUS, AND IMAGING APPARATUS Public/Granted day:2016-03-03
Information query
IPC分类:
