Invention Grant
- Patent Title: Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method
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Application No.: US15270530Application Date: 2016-09-20
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Publication No.: US10192771B2Publication Date: 2019-01-29
- Inventor: Hiromichi Kaba , Akihiko Taki
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2015-192155 20150929; JP2016-030154 20160219
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67 ; B08B11/02

Abstract:
A substrate holding/rotating device includes an urging unit, urging support portions of movable pins to either an open position or a hold position, first and second driving magnets, mounted in correspondence to respective movable pins of respective first and second movable pin groups and having mutually opposite magnetic pole directions, a first moving magnet, for urging the support portions of the first movable pin group to the other of either the open position or the hold position, and a second moving magnet, for urging the support portions of the second movable pin group to the other of either the open position or the hold position.
Public/Granted literature
Information query
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