Invention Grant
- Patent Title: Thin film based fan out and multi die package platform
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Application No.: US15689701Application Date: 2017-08-29
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Publication No.: US10192802B2Publication Date: 2019-01-29
- Inventor: Scott Jewler
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L23/31
- IPC: H01L23/31 ; H01L21/48 ; H01L23/498 ; H01L25/10

Abstract:
Thin film based fan out wafer level packaging and a method of manufacturing the same are disclosed. Embodiments include a method including forming tapered via holes in a first surface of a polymer film; forming a conductive pillar on the first surface of a semiconductor device; bonding a solderable surface of the conductive copper pillars to metallization on the second side of the polymer film; bonding the semiconductor device to the first surface of the polymer film over the conductive pillars with an underfill material; and depositing an encapsulant material over the semiconductor device and polymer film.
Public/Granted literature
- US20170365537A1 THIN FILM BASED FAN OUT AND MULTI DIE PACKAGE PLATFORM Public/Granted day:2017-12-21
Information query
IPC分类: